2300 Metal series
The 2300 Metal series is a Lam 12 inch metal film etching equipment can generally be configured with 1-6 cavities based on the platform. The equipment adopts the ICP etching principle, independently controlling ion concentration and bombardment force, facilitating the adjustment of process performance and stable production.
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描述
Product Features
1.Low loss of equipment process kit and long maintenance cycle
2.The equipment process is easy to adjust and the production is stable
3.Able to etch fine patterns
